| 2008 |
Artigo em periódico |
Improved effective charge density in MOS capacitors with PECVD SiOxNy dielectric layer obtained at low RF power
Albertin K; Pereyra I; Katia Franklin Albertin TORRES
JOURNAL OF NON-CRYSTALLINE SOLIDS
DOI 10.1016/j.jnoncrysol.2007.08.093
ISSN 0022-3093
|
PS
Chemical Engineering (miscellaneous)
|
| 2008 |
Artigo em periódico |
Study of reactive sputtering titanium oxide for metal-oxide-semiconductor capacitors
Albertin K; Pereyra I; Katia Franklin Albertin TORRES
Thin Solid Films
DOI 10.1016/j.tsf.2008.12.045
ISSN 0040-6090
|
PS
Materials Chemistry
|
| 2007 |
Trabalho em evento |
Study of MOS Capacitors with annealed TiO2 Gate Dielectric Layer
Katia Franklin Albertin TORRES; Marcio A VALLE; Inés PEREYRA
22th Symposium Microelectronic Technologic Devices SBMicro
DOI 10.1149/1.2766918
ISBN 19386737
|
PS
Electronic; Optical and Magnetic Materials
|
| 2007 |
Trabalho em evento |
Improved Effective Charge Density in MOS Capacitors with PECVD SiOxNy Dielectric Layer Obtained at Low RF Power
Katia Franklin Albertin TORRES; Inés PEREYRA
22st International Conference on Amorphous and Nonocrystalline Semiconductors
|
PS
Electronic; Optical and Magnetic Materials
|
| 2007 |
Artigo em periódico |
Study of MOS Capacitors With TiO2 and SiO2/TiO2 Gate Dielectric Layer
Katia Franklin Albertin TORRES; Marcio A VALLE; Inés PEREYRA
JICS. Journal of Integrated Circuits and Systems
ISSN 1807-1953
|
PS
Electrical and Electronic Engineering
|
| 2006 |
Trabalho em evento |
Study of TiO2 and SiO2/TiO2 as Gate Dielectric Materials
Katia Franklin Albertin TORRES; Marcio A VALLE; Inés PEREYRA
21st Symposium on Integrated Circuits and Systems Design
ISBN 1566775124
|
PS
Electronic; Optical and Magnetic Materials
|
| 2006 |
Trabalho em evento |
Optimized SiOxNy PECVD TFT´s
Katia Franklin Albertin TORRES; Inés PEREYRA
V Ibersensor
|
PS
Electrical and Electronic Engineering
|
| 2006 |
Trabalho em evento |
Study of structural properties of the PECVD SiOxNy dielectric layers obtained with different RF powers by XANES and EXAFS analysis
Katia Franklin Albertin TORRES; Marcia Carvalho De Abreu FANTINI; Inés PEREYRA
5o Encontro da Sociedade Brasileira de Pesquisa em Materiais
|
PS
Materials Chemistry
|
| 2006 |
Artigo em periódico |
Amorphous and excimer laser annealed SiC films for TFT fabrication
Garcia B; Estrada M; Albertin K; Carreno M; Pereyra I et al
Solid-State Electronics
DOI 10.1016/j.sse.2005.11.006
ISSN 0038-1101
|
PS
Electronic; Optical and Magnetic Materials
|
| 2006 |
Artigo em periódico |
Correlation of PECVD SiOxNy dielectric layer structural properties and Si/SiOxNy/Al capacitors interface electrical properties
Albertin K; Pereyra I; Katia Franklin Albertin TORRES
Journal of Non-Crystalline Solids
DOI 10.1016/j.jnoncrysol.2005.11.076
ISSN 0022-3093
|
PS
Electronic; Optical and Magnetic Materials
|
| 2006 |
Artigo em periódico |
One step a-Si:H TFT´s with PECVD SiOxNy gate insulator
Katia Franklin Albertin TORRES; Inés PEREYRA
Revista Mexicana de Fisica
ISSN 0035-001X
|
PS
Atomic and Molecular Physics; and Optics
|
| 2005 |
Trabalho em evento |
Polycrystallization of a-SiC:H layers by excimer laser annealing for TFT fabrication.
Brenda GARCÍA; Magali ESTRADA; Katia Franklin Albertin TORRES; Marcelo Nelson Paez CARREÑO
20th Symposium On Microelectronics Technology And Devices
|
PS
Industrial and Manufacturing Engineering
|
| 2005 |
Trabalho em evento |
Xanes Analysis of Amorphous Silicon Alloys
Denise CRIADO; Katia Franklin Albertin TORRES; Marcia Carvalho De Abreu FANTINI; Marco Isaias ALAYO; Inés PEREYRA
14a Reunião Anual de Usuários do LNLS
|
PS
Spectroscopy
|
| 2005 |
Trabalho em evento |
XANES Analysis of Amorphous Silicon Rich Oxynitride
Denise CRIADO; Katia Franklin Albertin TORRES; Marcia Carvalho De Abreu FANTINI; Marco Isaias ALAYO; Inés PEREYRA
14a Reunião Anual de Usuários do LNLS
|
PS
Spectroscopy
|
| 2005 |
Trabalho em evento |
Correlation of PECVD SiOxNy Dielectric Layer Structural Properties and Si/SiOxNy/Al Capacitors Interface Electrical Properties
Katia Franklin Albertin TORRES; Inés PEREYRA
21st International Conference on Amorphous and Nanocrystalline Semiconductors
|
PS
Electronic; Optical and Magnetic Materials
|
| 2005 |
Artigo em periódico |
Study of PECVD SiON films dielectric properties with different nitrogen concentration utilizing MOS capacitors
Albertin K; Pereyra I; Katia Franklin Albertin TORRES
MICROELECTRONIC ENGINEERING
DOI 10.1016/j.mee.2004.10.002
ISSN 0167-9317
|
PS
Electronic; Optical and Magnetic Materials
|
| 2004 |
Trabalho em evento |
ONE STEP TFT?S WITH PECVD SIOXNY GATE LAYER
Katia Franklin Albertin TORRES; Inés PEREYRA
19th Symposium Microelectronics Technology and Devices; SBMicro
|
PS
Industrial and Manufacturing Engineering
|
| 2004 |
Trabalho em evento |
?COMPARASION OF THE STRUCTURAL PROPERTIES OF THE PECVD SIOXNY DIELECTRIC LAYER WITH THE INTERFACE ELECTRICAL PROPERTIES IN SI/SIOXNY; AL CAPACITORS.?
Katia Franklin Albertin TORRES; Inés PEREYRA; Marcia Carvalho De Abreu FANTINI
III Encontro da Sociedade Brasileira de Pesquisa em Materiais; SBPMat 2004
|
PS
Electronic; Optical and Magnetic Materials
|
| 2004 |
Trabalho em evento |
VERY WIDE BAND GAP DIAMOND LIKE A-SIC:H OBTAINED BY PECVD
Katia Franklin Albertin TORRES; Adriana ABE; Marcelo Nélson Paez CARREÑO
III Encontro da Sociedade Brasileira de Pesquisa em Materiais; SBPMat 2004
|
PS
Surfaces; Coatings and Films
|
| 2004 |
Trabalho em evento |
ONE STEP a-SI:H TFT?S WITH PECVD SIOXNY GATE INSULATOR
Katia Franklin Albertin TORRES; Inés PEREYRA
IV Congreso Iberoamericano de Sensores; IV Ibersensor
|
PS
Electrical and Electronic Engineering
|
| 2004 |
Trabalho em evento |
ESTUDO DA CONDUTIVIDADE DO SILÍCIO AMORFO OBTIDO POR PECVD A BAIXA TEMPERATURA.
Alan Tavares Da COSTA; Katia Franklin Albertin TORRES; Marcelo Nélson Paez CARREÑO
6º Simpósio de Iniciação Científica e Tecnológica
|
PS
Physical and Theoretical Chemistry
|
| 2004 |
Trabalho em evento |
ESTUDO DE FILMES DE A-SI1-XCX DE ALTO GAP ÓPTICO OBTIDOS POR PECVD
Adriana ABE; Katia Franklin Albertin TORRES; Marcelo Nélson Paez CARREÑO
6º Simpósio de Iniciação Científica e Tecnológica
|
PS
Electronic; Optical and Magnetic Materials
|
| 2003 |
Trabalho em evento |
Study of PECVD Materials for TFT Application
Katia Franklin Albertin TORRES; Inés PEREYRA
II Encontro da Sociedade Brasileira de Pesquisa em Materiais
|
PS
Electronic; Optical and Magnetic Materials
|
| 2003 |
Artigo em periódico |
MOS capacitors with PECVD SiOxNy insulating layer
Albertin K; Katia Franklin Albertin TORRES
Materials Characterization
DOI 10.1016/S1044-5803(03)00083-4
ISSN 1044-5803
|
PS
Surfaces; Coatings and Films
|
| 2002 |
Trabalho em evento |
MOS Capacitors with PECVD SiOxNy Insulating Layer
Katia Franklin Albertin TORRES; Inés PEREYRA; Marco Isaias ALAYO
Proceedings of the 1st Brazilian Material Research Society Meeting
|
PS
Electronic; Optical and Magnetic Materials
|